IEM Distinguished Lecturers Seminar: Nanofabrication contributions to the future of integrated circuits: ultimate power consumption and quantum computing
***Coffee and Sweets will be served at 10:00 in the hall of BM 5202***
Abstract
The dimensions of semiconductor integrated circuit devices continue to shrink, as dictated by Moore's law, to offer better performance and lower power consumption. Soon, the most advanced technologies, fueled by the enormous data processing needs of artificial intelligence, will enter the sub-nanometer nodes, which implies great difficulties in manufacturing. On the other hand, these technologies can be used to exploit quantum phenomena and thus contribute to the development of practical quantum technology. In this presentation, I will show how new nanofabrication methods are being studied for their introduction in IC fabrication, based on bottom-up concepts such as directed self-assembly and single dopant incorporation, which, in turn enable the realization of single electron devices.
Biography
Francesc Perez-Murano is CSIC research professor at the Institute of Microelectronics of Barcelona. His research activity has been centered in the development novel nanofabrication methods for nanoelectronics and nanomechanical devices, and in particular nanolithography. He has performed pioneering contributions to the field of CMOS-NEMS, including the monolithic integration of nanomechanical resonators with CMOS circuits, a pioneering work at that time. The activity has evolved from integrating silicon cantilevers up to, recently (2022) the demonstration of integrating SETs with ‘in-house’ CMOS technology.
In the first part of his career his research was centered in the applications of Scanning Probe Microscopy (SPM) in the areas of micro/nano electronics. He made a pioneering work in the use of SPM as a nanolithography method by local anodic oxidation and hydrogen de-passivation of silicon. He made post-doctoral research stays in Denmark (DTU), and USA (NIST). He was awarded with the Young Investigator Award of the Generalitat de Catalunya in 2001. After obtaining a permanent positon, first at UAB and later on at CSIC, his research continued in the development of new manufacturing methods for nanoelectronics and nanoelectromechanical systems on the one hand, while on the other he started a line of research in nanoelectromechanical systems (NEMS). In 2002, he joined IMB-CNM to define and stablish a Nanotechnology oriented research line and facilities. Since then, he has made widely recognized contributions in these areas. Some relevant examples are: Fabrication of the first CNT transistors in Spain (2003); First works worldwide on the integration of Nanomechanical resonators in CMOS circuits using nanolithography methods (2006); Determination of a novel piezoresistive transduction phenomena in silicon nanowire resonators (2014); Fabrication of 3D plasmonic nanoparticles by Nanoimprint Lithography (2015); Use of focused ion beam implantation for the fabrication of single electron devices (2016); Development of high resolution directed self-assembly as a nanolithography methods (2012-2021), among others. HE is regularly in collaboration with many european research groups in top Institutions like CEA-LETI, CNRS, CNR, PSI, Franhoufer, HZDR or IBM- Zurich. He has participated as PI in 15 European funded projects (one of them as project coordinator) and more than 20 National funded projects (most of them as a project coordinator).
Vice-director of the Engineering School of the Universitat Autonoma de Barcelona (2000-2001); Vice-director of IMB-CNM (2016-2021); Member of the Steering Committee of Micro and Nano Engineering (2003-2021); Chair of MNE 2006 (Barcelona) and co-Chair of MNE 2017 (Braga); Member of the Program Committee of IEEE IEDM in 2018 and 2019; Member of the editorial board of Microelectronic Engineering (Elsevier) since 2014.
Presently, he is participating in several international initiatives to advance in the manufacturing of semiconductor quantum devices, and he coordinates the manufacturing pillar of the CSIC quantum technologies platform, the quantum ecosystem created by CSIC to advance the field of quantum technologies, fostering training, research and innovation.
He is member of the Royal Academy of Science and Arts of Barcelona since 2024.
Abstract
The dimensions of semiconductor integrated circuit devices continue to shrink, as dictated by Moore's law, to offer better performance and lower power consumption. Soon, the most advanced technologies, fueled by the enormous data processing needs of artificial intelligence, will enter the sub-nanometer nodes, which implies great difficulties in manufacturing. On the other hand, these technologies can be used to exploit quantum phenomena and thus contribute to the development of practical quantum technology. In this presentation, I will show how new nanofabrication methods are being studied for their introduction in IC fabrication, based on bottom-up concepts such as directed self-assembly and single dopant incorporation, which, in turn enable the realization of single electron devices.
Biography
Francesc Perez-Murano is CSIC research professor at the Institute of Microelectronics of Barcelona. His research activity has been centered in the development novel nanofabrication methods for nanoelectronics and nanomechanical devices, and in particular nanolithography. He has performed pioneering contributions to the field of CMOS-NEMS, including the monolithic integration of nanomechanical resonators with CMOS circuits, a pioneering work at that time. The activity has evolved from integrating silicon cantilevers up to, recently (2022) the demonstration of integrating SETs with ‘in-house’ CMOS technology.
In the first part of his career his research was centered in the applications of Scanning Probe Microscopy (SPM) in the areas of micro/nano electronics. He made a pioneering work in the use of SPM as a nanolithography method by local anodic oxidation and hydrogen de-passivation of silicon. He made post-doctoral research stays in Denmark (DTU), and USA (NIST). He was awarded with the Young Investigator Award of the Generalitat de Catalunya in 2001. After obtaining a permanent positon, first at UAB and later on at CSIC, his research continued in the development of new manufacturing methods for nanoelectronics and nanoelectromechanical systems on the one hand, while on the other he started a line of research in nanoelectromechanical systems (NEMS). In 2002, he joined IMB-CNM to define and stablish a Nanotechnology oriented research line and facilities. Since then, he has made widely recognized contributions in these areas. Some relevant examples are: Fabrication of the first CNT transistors in Spain (2003); First works worldwide on the integration of Nanomechanical resonators in CMOS circuits using nanolithography methods (2006); Determination of a novel piezoresistive transduction phenomena in silicon nanowire resonators (2014); Fabrication of 3D plasmonic nanoparticles by Nanoimprint Lithography (2015); Use of focused ion beam implantation for the fabrication of single electron devices (2016); Development of high resolution directed self-assembly as a nanolithography methods (2012-2021), among others. HE is regularly in collaboration with many european research groups in top Institutions like CEA-LETI, CNRS, CNR, PSI, Franhoufer, HZDR or IBM- Zurich. He has participated as PI in 15 European funded projects (one of them as project coordinator) and more than 20 National funded projects (most of them as a project coordinator).
Vice-director of the Engineering School of the Universitat Autonoma de Barcelona (2000-2001); Vice-director of IMB-CNM (2016-2021); Member of the Steering Committee of Micro and Nano Engineering (2003-2021); Chair of MNE 2006 (Barcelona) and co-Chair of MNE 2017 (Braga); Member of the Program Committee of IEEE IEDM in 2018 and 2019; Member of the editorial board of Microelectronic Engineering (Elsevier) since 2014.
Presently, he is participating in several international initiatives to advance in the manufacturing of semiconductor quantum devices, and he coordinates the manufacturing pillar of the CSIC quantum technologies platform, the quantum ecosystem created by CSIC to advance the field of quantum technologies, fostering training, research and innovation.
He is member of the Royal Academy of Science and Arts of Barcelona since 2024.
Practical information
- General public
- Free